短语词组短語Negative Etch -back 反廻蝕Reverse etch back 反廻蝕OEB Oxide Etch Back 氧化層平坦化蝕刻Process for copper etch back 發明名稱back channel etch type 背溝道刻蝕型back channel etch 道蝕刻 返回 etch back